Key research themes
1. How do energetic ion flux and temperature govern thin film microstructure evolution during deposition?
This research theme centers on understanding how deposition parameters—especially ion energy flux and substrate or film temperature—affect the microstructural development of thin films. The energetic ion flux arising in plasma-based deposition methods (e.g., cathodic arcs, high power impulse magnetron sputtering) influences nucleation, grain growth, and defect formation dynamics, while temperature impacts adatom mobility and diffusional processes. Insights in this area are crucial for tailoring film properties such as density, grain size, texture, and surface morphology in physical vapor deposition (PVD) and plasma-assisted techniques.
2. What strategies enable control of thin film microstructure through seed layers and nucleation engineering?
This theme investigates methods to tailor thin film microstructure by manipulating nucleation and early growth stages, prominently via the use of seed or buffer layers. By introducing thin nucleation layers or surface treatments, researchers aim to control grain orientation, size distribution, roughness, and adhesion, thus optimizing optical and electrical properties. Such controlled nucleation routes are important for transparent conducting oxides (TCOs), plasmonic films, and epitaxial compound semiconductors.
3. How do impurities and reactive flux ratios influence thin film growth kinetics and microstructure?
This theme addresses the impact of residual gases, ambient impurities, and controlled gas-phase species ratios during deposition on film structural properties, including grain size, texture, phase composition, and stress. Understanding impurity incorporation and reactive gas flux interplay informs strategies for impurity management, stress control, and phase tuning in sputtered metals, alloys, and compound semiconductor films. Kinetic Monte Carlo simulations and experimental X-ray diffraction analyses elucidate underlying atomistic mechanisms.