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Thin film growth

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Thin film growth refers to the process of depositing a layer of material, typically ranging from a few nanometers to several micrometers in thickness, onto a substrate. This process is crucial in various applications, including electronics, optics, and materials science, and involves techniques such as chemical vapor deposition and physical vapor deposition.
lightbulbAbout this topic
Thin film growth refers to the process of depositing a layer of material, typically ranging from a few nanometers to several micrometers in thickness, onto a substrate. This process is crucial in various applications, including electronics, optics, and materials science, and involves techniques such as chemical vapor deposition and physical vapor deposition.

Key research themes

1. How do energetic ion flux and temperature govern thin film microstructure evolution during deposition?

This research theme centers on understanding how deposition parameters—especially ion energy flux and substrate or film temperature—affect the microstructural development of thin films. The energetic ion flux arising in plasma-based deposition methods (e.g., cathodic arcs, high power impulse magnetron sputtering) influences nucleation, grain growth, and defect formation dynamics, while temperature impacts adatom mobility and diffusional processes. Insights in this area are crucial for tailoring film properties such as density, grain size, texture, and surface morphology in physical vapor deposition (PVD) and plasma-assisted techniques.

Key finding: Introduces an extended structure zone diagram (SZD) incorporating a normalized kinetic energy flux axis alongside generalized homologous temperature and net film thickness, to approximate the microstructure evolution of films... Read more
Key finding: Kinetic Monte Carlo simulations reveal that film surface roughness increases with deposition temperature during heteroepitaxial initial growth stages, across regimes from island growth to coalescence and early continuous film... Read more
Key finding: Develops a phase-field Cahn-Hilliard-based model including phase separation, adsorption, thermal diffusion, radiation-enhanced diffusion, and ion beam mixing to simulate surface roughness and phase structure evolution.... Read more
Key finding: Reviews optimization studies of physical vapor deposition methods emphasizing critical process parameters such as temperature, deposition rate, vacuum pressure, and plasma characteristics. Highlights how these parameters... Read more

2. What strategies enable control of thin film microstructure through seed layers and nucleation engineering?

This theme investigates methods to tailor thin film microstructure by manipulating nucleation and early growth stages, prominently via the use of seed or buffer layers. By introducing thin nucleation layers or surface treatments, researchers aim to control grain orientation, size distribution, roughness, and adhesion, thus optimizing optical and electrical properties. Such controlled nucleation routes are important for transparent conducting oxides (TCOs), plasmonic films, and epitaxial compound semiconductors.

Key finding: Demonstrates that employing thin chemically deposited fluorine-doped tin oxide (FTO) seeding layers with random orientation enhances nucleation during atmospheric pressure chemical vapor deposition (APCVD), leading to denser,... Read more
Key finding: Shows that inserting a ~1–2 nm germanium nucleation layer prior to silver deposition substantially reduces root-mean-square surface roughness and narrows grain size distribution. The Ge layer mediates silver wetting and... Read more
Key finding: Introduces a templated liquid-phase (TLP) growth method whereby a geometry-constrained liquid metal layer serves as a nucleation template to grow crystalline compound semiconductors directly on amorphous and non-epitaxial... Read more

3. How do impurities and reactive flux ratios influence thin film growth kinetics and microstructure?

This theme addresses the impact of residual gases, ambient impurities, and controlled gas-phase species ratios during deposition on film structural properties, including grain size, texture, phase composition, and stress. Understanding impurity incorporation and reactive gas flux interplay informs strategies for impurity management, stress control, and phase tuning in sputtered metals, alloys, and compound semiconductor films. Kinetic Monte Carlo simulations and experimental X-ray diffraction analyses elucidate underlying atomistic mechanisms.

Key finding: Sputtered single-element and alloy thin films subjected to varying impurity-to-metal flux ratios demonstrate universal behavior, where at low impurity ratios domain size remains stable but lattice parameters shift, while at... Read more
Key finding: Presents a layer-by-layer vapor deposition method achieving highly oriented and stoichiometric compound thin films through sequential alternating exposure of substrate surfaces to individual elemental vapors at controlled... Read more

All papers in Thin film growth

We have studied the exchange anisotropy of ferromagnetic Fe films grown on antiferromagnetic FeF2 single crystals. The behavior of the hysteresis loops of the Fe above and below the Néel temperature TN of FeF2 indicates a 90° rotation of... more
A drastic reduction in temperature dependent cross-plane thermal conductivity κ⊥ occurs in Ge quantum dot superlattices (QDSLs), depending on the vertical correlation between dots. Measurements show at least a twofold decrease of κ⊥ in... more
This investigation aims at studying-by in situ grazing-incidence small-angle x-ray scattering-the process of growth of hexagonal CoSi 2 nanoplatelets endotaxially buried in a Si(001) wafer. The early formation of spherical Co... more
A series of polyanions and polycations have been synthesized from atactic, syndiotactic, and isotactic forms of poly(methyl methacrylate) and used to construct polyelectrolyte multilayers (PEMs). Polymer tacticity has been found to have a... more
The growth of indium on a vicinal Si(100)-(2×1) surface at room temperature by femtosecond pulsed laser deposition (fsPLD) was investigated by in situ reflection high-energy electron diffraction (RHEED). Recovery of the RHEED intensity... more
It is commonly assumed that in uncompensated FM/AF interfaces, the easy axes of antiferromagnetic grains are aligned toward the magnetic field direction applied during the film growth. However, due to several intrinsic and extrinsic... more
Experimental technique Donor doped Strontium Titanate is well known for its capability as resistive high temperature oxygen sensor. An interesting application of this sensor would be the analysis of automobile exhaust, as it would allow... more
Differential entropy, along with fractal dimension, is herein employed to describe and interpret the shape complexity of self-similar organic islands. The islands are imaged with in situ Atomic Force Microscopy, following, step-by-step,... more
In situ Atomic Force Microscopy (AFM) allowed us to investigate the evolution at the early stages of the growth of organic thin films. An Ultra-High Vacuum AFM, integrated with a Knudsen effusion cell for the sublimation of... more
Organic molecular beam deposition has been used to surpass the chemical approach commonly adopted for coating SiOx surfaces, obtaining a smooth and uniform monomolecular layer of sexithiophene that fully covers the SiOx surface on the... more
Drain-source current in organic thin-film transistors has been monitored in situ and in real time during the deposition of pentacene. The current starts to flow when percolation of the first monolayer (ML) occurs and, depending on the... more
Charge transport in organic thin film transistors takes place in the first few molecular layers in contact with the gate dielectric. Here we demonstrate that the charge transport pathways in these devices are extremely sensitive to the... more
Summary: A computer simulation model is proposed to study film growth and surface roughness in aqueous (A) solution of hydrophobic (H) and hydrophilic (P) groups on a simple three dimensional lattice of size $L_x \times L_y \times L_z$... more
Metal-oxide thin films (ZnO, TiO 2 and other so on) have received considerable interest from scientists due to their remarkable performance in electronics, optics and photonics. In this study we have reported a way of fabricating films... more
In situ Atomic Force Microscopy (AFM) allowed us to investigate the evolution at the early stages of the growth of organic thin films. An Ultra-High Vacuum AFM, integrated with a Knudsen effusion cell for the sublimation of... more
Charge transport in organic thin film transistors takes place in the first few molecular layers in contact with the gate dielectric. Here we demonstrate that the charge transport pathways in these devices are extremely sensitive to the... more
DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page... more
Electron paramagnetic resonance (EPR) measurements have been made at X-band (f9.5 GHz) and W-band (f95 GHz) of a-C:H films on (1 0 0) silicon substrates; the sample temperature was varied in the range 5-300 K. Two types of film were... more
The evolution of clean, In-terminated InP(100)-(2ϫ4) surfaces is investigated by synchrotron-radiationexcited photoemission spectroscopy as a function of annealing temperature. As-prepared InP(100)-(2ϫ4) surfaces are found to be free of... more
The growth mechanism and adsorbate-induced surface morphology of metal atoms on semiconducting surfaces crucially determines the electronic and physicochemical properties of these metal/semiconductor systems. In this study, we investigate... more
A combination of electron spin resonance and Raman spectroscopy measurements is applied to fully characterise a-C 1Àx N x :H films (x 6 20 at.%), grown by plasma decomposition of C 2 H 2-N 2 mixtures. The observed decrease in the spin... more
Cataphoretic deposition of an epoxy primer was carried out on four different substrates: bare steel; phosphated steel; bare zinc-plated steel; and phosphated zinc-plated steel. Film growth was followed by observing the deposition current... more
Renewable energy sources offer a viable green energy solution to the increasing global energy demands, and the photovoltaics offers a means of tapping into the abundance of the solar energy. Molybdenum (Mo) thin film has been used as a... more
Molybdenum thin films were sputter deposited under different conditions of DC power and chamber pressure. The structure and topography of the films were investigated using AFM, SEM and XRD techniques. Van der Pauw method and tape test... more
Using spectroscopic ellipsometry we investigated and analyzed the pseudo-optical constants of Cu2ZnSnSe4 bulk crystals, grown by the Bridgman method, over 0.8–4.5 eV photon energy range. The structures found in the spectra of the complex... more
The growth mode of domains of the hexagonal lattice of strained gadolinium deposited on Mo(112) has been investigated with low-energy electron diffraction (LEED) and scanning tunneling microscopy (STM). The molybdenum substrate... more
The adsorption of hydrogen and Cs alone as well as the coadsorption of Cs and hydrogen on W(110) was studied by metastable impact electron spectroscopy (MIES) and supplemented by UPS, AES, and work function measurements. The main... more
The initial stages of degradation of high-T, superconductor surfaces by interaction with atmospheric gases have been studied using ultraviolet photoelectron spectroscopy. 02 has little eN'ect, awhile H2O adsorbs dissociatively with an... more
The initial stages of degradation of high-T, superconductor surfaces by interaction with atmospheric gases have been studied using ultraviolet photoelectron spectroscopy. 02 has little eN'ect, awhile H2O adsorbs dissociatively with an... more
Low-energy electron diffraction, scanning tunneling microscopy, and photoelectron spectroscopy results from the submonolayer Smand Yb-induced surface structures are presented. Several similar metal-induced surface reconstructions are... more
Highlights:  New organic free Bi2S3 nanoflakes were synthesized using the HMDS-assisted wet chemical method  Gram scale synthesis (2 g) with 98% morphological yield of flakes was demonstrated  Prototype photodetector was fabricated,... more
Motivated by recent experiments on submonolayer organic film growth with anomalous diffusion, a general rate-equation (RE) theory of submonolayer island nucleation and growth was developed (Amar and Semaan, 2016) [23], which takes into... more
Silver-diamond like carbon (Ag-DLC) nanocomposite films were deposited on glass and silicon substrates by co-deposition of RF-sputtering and RF-PECVD method in acetylene plasma. The effects of deposition time on creation of conductive... more
Flower-like morphology of ZnO thin films were successfully electrodeposited via a one-step route only by changing electrodeposition duration and potential at a fixed concentration on n-Si (100) in78.10-4 M Zn (NO3)2, 6H2O and 0.1M KNO3... more
We investigated Bi thin film growth on Ge(111) by using low-energy electron diffraction (LEED) and scanning tunneling microscopy (STM). In the submonolayer regime, adsorbed Bi atoms form patches of the (2 × 1) structure. However, the... more
In this Letter we stress the importance of final-state eAects in photoelectron spectroscopy. In particular, we address the problem of Schottky-barrier formation, as studied via core-level shifts in photoemission. We have calculated the... more
The structural properties of Cs adsorption and Cs and 0 coadsorption on Mo(100) at room temperature are studied by LEED and AES. With increasing Cs coverage we observe: (i) At 6'=0.3 ML. a fi~fi R45O structure with an overall 4mm symmetry... more
2014 Nous avons étudié l'adsorption de Na et de K sur la face (100) du W à la température ambiante par variation du travail de sortie, diffraction d'électrons lents et spectroscopie de perte d'énergie d'électrons résolue angulairement.... more
The atomic structures of Na and Cs layers adsorbed on the Pt(ll1) face have been studied at 85 K and room temperature by LEED. At room temperature, Na layers are fully disordered while Cs overlayers exhibit ordered structures. At low... more
The effect of energetic ion bombardment on the properties of tantalum thin films was investigated. To achieve such energetic ion bombardment during the process the Ta thin films were deposited by deep oscillation magnetron sputtering... more
The structure stability under high pressure and thermal expansion behavior of Na 3 OBr and Na 4 OI 2 , two prototypes of alkali-metal-rich antiperovskites, were investigated by in situ synchrotron X-ray diffraction techniques under high... more
The aim of this work was to study different strategies for the synthesis of mordenite coatings on thin FeCrAl alloy foils in order to obtain adherent, stable and homogeneous films for their use as catalytic microreactors. For this... more
The purpose of this study was to describe the 3-D nano-scaled surface texture of the Nickel-Carbon (Ni-C) nanocomposite thin films composed of Ni nanoparticles with different average sizes embedded in amorphous hydrogenated carbon using... more
The purpose of this study was to investigate the topography of silicon carbide films at two steps of growth. The topography was measured by atomic force microscopy. The data were processed for extraction of information about surface... more
The purpose of this study was to investigate the topography of silicon carbide films at two steps of growth. The topography was measured by atomic force microscopy. The data were processed for extraction of information about surface... more
High-aspect ratio porous structures with controllable pore diameters and without a stiff substrate can be fabricated using the ion track technique. Atomic layer deposition is an ideal technique for depositing thin films and functional... more
Hard coating materials were widely applied on top surface of the molding dies to prolong lifetime and enhance the mechanical properties for glass molding mass production. The glass molding process can be recognized as both a cyclic... more
The structure stability under high pressure and thermal expansion behavior of Na 3 OBr and Na 4 OI 2 , two prototypes of alkali-metal-rich antiperovskites, were investigated by in situ synchrotron X-ray diffraction techniques under high... more
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