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Figure 6. a) Cross sectional transmission optical microscope image of type II waveguide with a separation of 13 ym and guided mode at 635-nr wavelength shown. Reproduced under the terms of a Creative Commons Attribution 4.0 International License.2° Copyright 2016, The Authors, publishe by Springer Nature. b) A map of refractive index profile within the waveguide, obtained from polarized micro-Raman analysis ([001] crystallographi direction is taken along the vertical axis). Reproduced with permission.?" Copyright 2018, American Physical Society. c) Transverse optical microscop image of type II waveguide with a separation of 40 pm and d) the optical guided mode at 8.7 ym. Reproduced with permission.7] Copyright 201 Elsevier.

Figure 6 a) Cross sectional transmission optical microscope image of type II waveguide with a separation of 13 ym and guided mode at 635-nr wavelength shown. Reproduced under the terms of a Creative Commons Attribution 4.0 International License.2° Copyright 2016, The Authors, publishe by Springer Nature. b) A map of refractive index profile within the waveguide, obtained from polarized micro-Raman analysis ([001] crystallographi direction is taken along the vertical axis). Reproduced with permission.?" Copyright 2018, American Physical Society. c) Transverse optical microscop image of type II waveguide with a separation of 40 pm and d) the optical guided mode at 8.7 ym. Reproduced with permission.7] Copyright 201 Elsevier.

Related Figures (14)

Figure 1. a) Schematic showing the crystal structure of diamond with NV center (carbon atoms represented in black, nitrogen atom shown in yellow, anc the vacancy shown in white), excited with a green laser beam and the vacancy is shown to fluoresce in red. b) Simplified electronic energy level diagrarr of the ground state of NV center showing the triplet ground (?A) and excited states (?E), and the metastable singlet manifold. Optical transitions are indicated by arrows.
Figure 1. a) Schematic showing the crystal structure of diamond with NV center (carbon atoms represented in black, nitrogen atom shown in yellow, anc the vacancy shown in white), excited with a green laser beam and the vacancy is shown to fluoresce in red. b) Simplified electronic energy level diagrarr of the ground state of NV center showing the triplet ground (?A) and excited states (?E), and the metastable singlet manifold. Optical transitions are indicated by arrows.
Figure 2. a) Type | waveguide writing: focused fs laser pulses are nonlinearly absorbed below the surface of a transparent material resulting in a permanent refractive index increase. Reproduced with permission.!'971 Copyright 2015, Wiley-VCH. b) Type Il: two lines of reduced refractive index are laser written close together, producing a stressed central region capable of guiding light. In both modalities, motion stages can be used to translate the sample with respect to the beam to produce 3D photonics. Reproduced with permission.24 Copyright 2014, Wiley-VCH.
Figure 2. a) Type | waveguide writing: focused fs laser pulses are nonlinearly absorbed below the surface of a transparent material resulting in a permanent refractive index increase. Reproduced with permission.!'971 Copyright 2015, Wiley-VCH. b) Type Il: two lines of reduced refractive index are laser written close together, producing a stressed central region capable of guiding light. In both modalities, motion stages can be used to translate the sample with respect to the beam to produce 3D photonics. Reproduced with permission.24 Copyright 2014, Wiley-VCH.
Figure 3. Photonic structures fabricated in diamond with ion-beam-based techniques. a) Solid Immersion Lens fabricated with FIB in single-crysta diamond to improve light collection efficiency from photoluminescent emitters localized in the bulk. Reproduced with permission.!°§l Copyright 2010 American Physical Society. b) Suspended waveguiding structures fabricated with a FIB-assisted lift-off technique. Reproduced with permission.)>! Copy right 2005, Wiley-VCH. c) Photonic structures fabricated with FIB in free-standing membranes removed from Si substrates on which they were heteroepi taxially grown. Reproduced with permission.!”4] Copyright 2012, Springer Nature. d) Free standing membranes and relevant integrated microstructure obtained by the lift-off of homoepitaxially CVD grown films. Reproduced with permission.!'2] Copyright 2012, Wiley-VCH.
Figure 3. Photonic structures fabricated in diamond with ion-beam-based techniques. a) Solid Immersion Lens fabricated with FIB in single-crysta diamond to improve light collection efficiency from photoluminescent emitters localized in the bulk. Reproduced with permission.!°§l Copyright 2010 American Physical Society. b) Suspended waveguiding structures fabricated with a FIB-assisted lift-off technique. Reproduced with permission.)>! Copy right 2005, Wiley-VCH. c) Photonic structures fabricated with FIB in free-standing membranes removed from Si substrates on which they were heteroepi taxially grown. Reproduced with permission.!”4] Copyright 2012, Springer Nature. d) Free standing membranes and relevant integrated microstructure obtained by the lift-off of homoepitaxially CVD grown films. Reproduced with permission.!'2] Copyright 2012, Wiley-VCH.
Figure 4. a) Comparison between available results in the literature for the variation of refractive index in ion implanted diamond as a function o vacancy density at A = 638 nm (data from refs. [76,78-80,83]). b) Schematic of the fabrication and measurement geometry for the proton beam. written waveguides in Lagomarsino et al.;!85) c) simulated amplitude maps of the first five propagating modes in the waveguide. (b,c) Reproduced with permission.!§>] Copyright 2010, American Physical Society.
Figure 4. a) Comparison between available results in the literature for the variation of refractive index in ion implanted diamond as a function o vacancy density at A = 638 nm (data from refs. [76,78-80,83]). b) Schematic of the fabrication and measurement geometry for the proton beam. written waveguides in Lagomarsino et al.;!85) c) simulated amplitude maps of the first five propagating modes in the waveguide. (b,c) Reproduced with permission.!§>] Copyright 2010, American Physical Society.
Figure 5. a) Cross sectional transmission optical microscope image of a single laser written track written at 50 pm depth in diamond at 500 kHz repetition rate. b) Micro-Raman spectra captured within the laser written track at repetition rates of 5, 25, and 500 kHz. (a,b) Reproduced under the terms of a Creative Commons Attribution 4.0 International License.° Copyright 2016, The Authors, published by Springer Nature.
Figure 5. a) Cross sectional transmission optical microscope image of a single laser written track written at 50 pm depth in diamond at 500 kHz repetition rate. b) Micro-Raman spectra captured within the laser written track at repetition rates of 5, 25, and 500 kHz. (a,b) Reproduced under the terms of a Creative Commons Attribution 4.0 International License.° Copyright 2016, The Authors, published by Springer Nature.
Figure 7. a) Overhead (left) and transverse (right) transmission optical microscopy image of Bragg grating waveguide inscribed in diamond. b) Trans mission (blue) and reflection (red) spectra of the Bragg grating waveguide. (a,b) Reproduced with permission.® Copyright 2017, The Optical Societ (OSA).
Figure 7. a) Overhead (left) and transverse (right) transmission optical microscopy image of Bragg grating waveguide inscribed in diamond. b) Trans mission (blue) and reflection (red) spectra of the Bragg grating waveguide. (a,b) Reproduced with permission.® Copyright 2017, The Optical Societ (OSA).
Figure 8. Integration of diamond-based single-photon emitters in diamond structures. a) Large-scale fabrication of an NV center array by N implanta- tion through a patterned resist mask. Reproduced with permission.!"!2] Copyright 2010, American Chemical Society. b) High-resolution fabrication of NV centers’ by means of implantation through a pierced scanning AFM collimator. Reproduced with permission.!""4] Copyright 2010, Wiley-VCH. c) 1D photonic cavity equipped with an embedded NV center’s array fabricated through targeted FIB N implantation. Reproduced with permission.!"2"] Copy- right 2016, American Physical Society. d) NV centers embedded in an opto-mechanical resonator through a broad N beam implantation at low fluence. Reproduced with permission.!'48l Copyright 2014. American Physical Society. e) Diamond electro-mechanical system consisting of a cantilever with SiV centers fabricated by FIB ion implantation. Reproduced under the terms of a Creative Commons Attribution 4.0 International License.!'5"] Copyright 2018, The Authors, published by Springer Nature.
Figure 8. Integration of diamond-based single-photon emitters in diamond structures. a) Large-scale fabrication of an NV center array by N implanta- tion through a patterned resist mask. Reproduced with permission.!"!2] Copyright 2010, American Chemical Society. b) High-resolution fabrication of NV centers’ by means of implantation through a pierced scanning AFM collimator. Reproduced with permission.!""4] Copyright 2010, Wiley-VCH. c) 1D photonic cavity equipped with an embedded NV center’s array fabricated through targeted FIB N implantation. Reproduced with permission.!"2"] Copy- right 2016, American Physical Society. d) NV centers embedded in an opto-mechanical resonator through a broad N beam implantation at low fluence. Reproduced with permission.!'48l Copyright 2014. American Physical Society. e) Diamond electro-mechanical system consisting of a cantilever with SiV centers fabricated by FIB ion implantation. Reproduced under the terms of a Creative Commons Attribution 4.0 International License.!'5"] Copyright 2018, The Authors, published by Springer Nature.
Figure 9. a) Overhead optical microscope image of 2D array of single femtosecond laser exposures. Markers visible in both the optical microscope anc the fluorescence microscope to enable orientation of the sample have been written at the edge of the array region with higher fluence. b) Overheac confocal PL intensity map and c) spectrum from a single NV produced by a single 24 nj ultrashort laser pulse followed by annealing. d) Intensit autocorrelation measurement of photons from the single NV revealing single photon emission. (a—d) Reproduced with permission.!71 Copyright 2017 MDPI (Multidisciplinary Digital Publishing Institute).
Figure 9. a) Overhead optical microscope image of 2D array of single femtosecond laser exposures. Markers visible in both the optical microscope anc the fluorescence microscope to enable orientation of the sample have been written at the edge of the array region with higher fluence. b) Overheac confocal PL intensity map and c) spectrum from a single NV produced by a single 24 nj ultrashort laser pulse followed by annealing. d) Intensit autocorrelation measurement of photons from the single NV revealing single photon emission. (a—d) Reproduced with permission.!71 Copyright 2017 MDPI (Multidisciplinary Digital Publishing Institute).
Figure 10. a,b) Schematic cross-section of femtosecond laser written ‘empty’ (a) and ‘static exposure’ (b) waveguides, with modification lines in black separated by 13 pm and the expected 10 pm mode field diameter of the waveguide mode outlined in red, with integrated static exposures, separated by 2 pm axially marked in gray. c,d) Photoluminescence confocal cross-sections (above) and maps (below) of ‘empty’ (c) and ‘static exposure’ (d) waveguide and modification lines written in HPHT sample after annealing. PL maps were acquired from the top of the sample using a homebuilt confocal microscope, causing an apparent axial squeezing of the cross-section due to refraction.
Figure 10. a,b) Schematic cross-section of femtosecond laser written ‘empty’ (a) and ‘static exposure’ (b) waveguides, with modification lines in black separated by 13 pm and the expected 10 pm mode field diameter of the waveguide mode outlined in red, with integrated static exposures, separated by 2 pm axially marked in gray. c,d) Photoluminescence confocal cross-sections (above) and maps (below) of ‘empty’ (c) and ‘static exposure’ (d) waveguide and modification lines written in HPHT sample after annealing. PL maps were acquired from the top of the sample using a homebuilt confocal microscope, causing an apparent axial squeezing of the cross-section due to refraction.
Figure 11. a) PL spectra from ‘empty’ waveguide, ‘static exposure’ waveguide, and from a bright spot corresponding to a static exposure. b) Powe dependent PL of ‘empty’ waveguide, ‘static exposure’ waveguide, and from a bright spot corresponding to a static exposure. c) Overhead microscop view of ‘static exposure’ waveguide. The sample was excited with a green laser end-fire coupled into the waveguide from the right, while the light scatterin from the waveguide was filtered using a 532 nm notch filter from the top of the sample and recorded on a CCD.
Figure 11. a) PL spectra from ‘empty’ waveguide, ‘static exposure’ waveguide, and from a bright spot corresponding to a static exposure. b) Powe dependent PL of ‘empty’ waveguide, ‘static exposure’ waveguide, and from a bright spot corresponding to a static exposure. c) Overhead microscop view of ‘static exposure’ waveguide. The sample was excited with a green laser end-fire coupled into the waveguide from the right, while the light scatterin from the waveguide was filtered using a 532 nm notch filter from the top of the sample and recorded on a CCD.
Figure 12. a,b) Examples of microfluidic sensors based on quantum detection schemes. Adapted with permission.!"81,182] Copyright 2013, 2019, Ameri- can Chemical Society and Springer Nature, respectively. c) Schematic of the monolithic fabrication of a microfluidic channel by means of ion beam lithog- raphy (adapted with permission.!"89l Copyright 2017, Elsevier) and d,e) optical micrographs of the obtained structures (adapted with permission.185:189] Copyright 2013, 2017, SPIE and Elsevier, respectively).
Figure 12. a,b) Examples of microfluidic sensors based on quantum detection schemes. Adapted with permission.!"81,182] Copyright 2013, 2019, Ameri- can Chemical Society and Springer Nature, respectively. c) Schematic of the monolithic fabrication of a microfluidic channel by means of ion beam lithog- raphy (adapted with permission.!"89l Copyright 2017, Elsevier) and d,e) optical micrographs of the obtained structures (adapted with permission.185:189] Copyright 2013, 2017, SPIE and Elsevier, respectively).
Figure 13. a) Focusing a Gaussian beam with a standard lens: the focal volume is determined by the transverse spot size and the depth of focus, typicall leading to a high degree of spatial energy confinement in both radial and axial directions. b) Focusing with axicon or SLM to produce a Bessel beam leading to a high intensity in a narrow but axially elongated focal region.
Figure 13. a) Focusing a Gaussian beam with a standard lens: the focal volume is determined by the transverse spot size and the depth of focus, typicall leading to a high degree of spatial energy confinement in both radial and axial directions. b) Focusing with axicon or SLM to produce a Bessel beam leading to a high intensity in a narrow but axially elongated focal region.
Figure 14. Top-view SEM images of the microchannels formed inside typical machined trenches for two different transverse writing directions; respec- tively parallel a) and orthogonal b) to the laser beam polarization. In c) and d), the AFM tapping-amplitude images of the labeled (dashed) regions in the SEM images, respectively. Reproduced with permission.!"8/] Copyright 2017, The Optical Society (OSA).
Figure 14. Top-view SEM images of the microchannels formed inside typical machined trenches for two different transverse writing directions; respec- tively parallel a) and orthogonal b) to the laser beam polarization. In c) and d), the AFM tapping-amplitude images of the labeled (dashed) regions in the SEM images, respectively. Reproduced with permission.!"8/] Copyright 2017, The Optical Society (OSA).
Figure 15. SEM images of pillar-like microstructure arrays written on a diamond surface by a 200 fs pulsed Bessel beam in transverse writing configuration and for different cone angles and pulse energies: a) 6 = 9°, E=5.4 J, b) 0 = 12°, E=4.5 pJ, c) 0 = 20°, E= 3.5 pJ and d) 6 = 24°, E = 3 pj. Distance between the writing trajectories is 15 pm. The 10 pm scale bar shown in (b) is the same for all images. Reproduced under the terms of a Creative Commons Attribution 4.0 International License.!'%] Copyright 2018, The Authors, published by Springer Nature.
Figure 15. SEM images of pillar-like microstructure arrays written on a diamond surface by a 200 fs pulsed Bessel beam in transverse writing configuration and for different cone angles and pulse energies: a) 6 = 9°, E=5.4 J, b) 0 = 12°, E=4.5 pJ, c) 0 = 20°, E= 3.5 pJ and d) 6 = 24°, E = 3 pj. Distance between the writing trajectories is 15 pm. The 10 pm scale bar shown in (b) is the same for all images. Reproduced under the terms of a Creative Commons Attribution 4.0 International License.!'%] Copyright 2018, The Authors, published by Springer Nature.
Related topics:
Quantum OpticsIon ImplantationFemtosecond Laser MicromachiningQuantum Photonics
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