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Figure 53 object phase correction at the object plane The phase appears to be wrapped, but this is not due to the surface itself, it is due to the illuminating beam. As the diffracted light from this chip was very low, the concentratec laser beam was shone onto the chip surface (coming directly from the output port of the laser, before the reference beam expansion and collimation). This beam is not a perfec plane wave, instead the laser section tends to expand slightly after a few meters. Thus 11 can be considered as a spherical wave, and the object phase can be corrected by spherical field matrix. This is illustrated in figure 53. Additionally, a plane fit was performed because a phase jump appeared in the middle of the chip surface. The corrected phase map is in the range [-2;+z], and this range corresponds to height values between 0 and 632.8 nm (one wavelength). It does not seem to undergo phase jumps on the IC surface, which means that the depths variations are within one wavelength. Not all the chip’s surface is visible, because the laser beam was concentrated on the right part of the chip, and this side diffracted more light than the left side. The corrected phase map is in the range |—73+70 | , and this range corresponds to height
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