Porous single crystalline 4H silicon carbide rugate mirrors
2017, APL Materials
https://doi.org/10.1063/1.5001876Abstract
AI
AI
Porous 4H silicon carbide (SiC) optical rugate mirrors have been developed using a unique method that combines metal assisted photochemical etching and photoelectrochemical etching. The porosity level was fine-tuned by adjusting the applied voltage, while the etching depth correlated with the measured charge. Image processing techniques were utilized to estimate porosity and refractive index profiles, which facilitated accurate predictions of reflection spectrum peak positions. Additionally, this innovative method allows for the reuse of the bulk SiC samples for further mirror fabrications.
References (21)
- Y. Qu, H. Zhou, and X. Duan, Nanoscale 3, 4060-4068 (2011).
- T. E. Bell, P. T. J. Gennissen, D. DeMunter, and M. Kuhl, J. Micromech. Microeng. 6, 361 (1996).
- P. A. Snow, E. K. Squire, P. St. J. Russell, and L. T. Canham, J. Appl. Phys. 86, 1781-1784 (1999).
- P. Menna, G. Di Francia, and V. La Ferrara, Sol. Energy Mater. Sol. Cells 37, 13-24 (1995).
- V. Torres-Costa and R. J. Martin-Palma, J. Mater. Sci. 45, 2823-2838 (2010).
- X. Li and P. W. Bohn, Appl. Phys. Lett. 77, 2572-2574 (2000). 106106-6 Leitgeb et al. APL Mater. 5, 106106 (2017)
- E. Lorenzo, C. J. Oton, N. E. Capuj, M. Ghulinyan, D. Navarro-Urrios, Z. Gaburro, and L. Pavesi, Appl. Opt. 44, 5415-5421 (2005).
- C. Pacholski, Sensors 13, 4694-4713 (2013).
- D. B. Mawhinney, J. A. Glass, and J. T. Yates, J. Phys. Chem. B 101, 1202-1206 (1997).
- V. Labunov, V. Bondarenko, I. Glinenko, A. Dorofeev, and L. Tabulina, Thin Solid Films 137, 123-134 (1986).
- J. Salonen and E. Mäkilä, "Thermal stabilization of porous silicon for biomedical applications," in Porous Silicon for Biomedical Applications (Woodhead Publishing Ltd., UK, 2014), Chap. 2, pp. 21-34.
- Y. Ke, R. P. Devaty, and W. J. Choyke, Electrochem. Solid-State Lett. 10, K24-K27 (2007).
- M. Leitgeb, C. Zellner, M. Schneider, and U. Schmid, ECS J. Solid State Sci. Technol. 5, P556-P564 (2016).
- M. Leitgeb, C. Zellner, C. Hufnagl, M. Schneider, S. Schwab, H. Hutter, and U. Schmid, J. Electrochem. Soc. 164, E337-E347 (2017).
- Y. Ke, "Formation and characterization of columnar porous silicon carbide fabricated by photo-electrochemical etching," Ph.D. thesis, University of Pittsburgh, 2007, p. 84.
- M. Leitgeb, A. Backes, C. Zellner, M. Schneider, and U. Schmid, ECS J. Solid State Sci. Technol. 5, P148-P150 (2016).
- P. Newby, J.-M. Bluet, V. Aimez, L. G. Fréchette, and V. Lysenko, Phys. Status Solidi C 8, 1950-1953 (2011).
- M. Khardani, M. Bouaïcha, and B. Bessaïs, Phys. Status Solidi C 4, 1986-1990 (2007).
- S. Singh, J. R. Potopowicz, L. G. van Uitert, and S. H. Wemple, Appl. Phys. Lett. 19, 53-56 (1971).
- O. Stenzel, Optical Coatings-Material Aspects in Theory and Practice (Springer, 2014), p. 336.
- S. Larouche and L. Martinu, Appl. Opt. 47, C219-C230 (2008).