Lu et al., 2023 - Google Patents

An effective scheduling method to single-arm cluster tools for processing multiple wafer types.

Lu et al., 2023

View PDF
Document ID
14753593517748777236
Author
Lu Y
Li J
Qiao Y
Li Z
Wu N
Pan C
Publication year
Publication venue
Journal of Industrial & Management Optimization

External Links

Snippet

Recently, in semiconductor manufacturing, cluster tools have to process multiple wafer types concurrently due to product customization. Different wafer types may have different processing routes, which causes deadlocks and complicates the scheduling problem of …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for programme control, e.g. control unit
    • G06F9/06—Arrangements for programme control, e.g. control unit using stored programme, i.e. using internal store of processing equipment to receive and retain programme
    • G06F9/46—Multiprogramming arrangements
    • G06F9/48—Programme initiating; Programme switching, e.g. by interrupt
    • G06F9/4806—Task transfer initiation or dispatching
    • G06F9/4843—Task transfer initiation or dispatching by program, e.g. task dispatcher, supervisor, operating system
    • G06F9/4881—Scheduling strategies for dispatcher, e.g. round robin, multi-level priority queues
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for programme control, e.g. control unit
    • G06F9/06—Arrangements for programme control, e.g. control unit using stored programme, i.e. using internal store of processing equipment to receive and retain programme
    • G06F9/46—Multiprogramming arrangements
    • G06F9/48—Programme initiating; Programme switching, e.g. by interrupt
    • G06F9/4806—Task transfer initiation or dispatching
    • G06F9/4843—Task transfer initiation or dispatching by program, e.g. task dispatcher, supervisor, operating system
    • G06F9/485—Task life-cycle, e.g. stopping, restarting, resuming execution
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for programme control, e.g. control unit
    • G06F9/06—Arrangements for programme control, e.g. control unit using stored programme, i.e. using internal store of processing equipment to receive and retain programme
    • G06F9/46—Multiprogramming arrangements
    • G06F9/50—Allocation of resources, e.g. of the central processing unit [CPU]
    • G06F9/5083—Techniques for rebalancing the load in a distributed system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for programme control, e.g. control unit
    • G06F9/06—Arrangements for programme control, e.g. control unit using stored programme, i.e. using internal store of processing equipment to receive and retain programme
    • G06F9/46—Multiprogramming arrangements
    • G06F9/50—Allocation of resources, e.g. of the central processing unit [CPU]
    • G06F9/5061—Partitioning or combining of resources
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for programme control, e.g. control unit
    • G06F9/06—Arrangements for programme control, e.g. control unit using stored programme, i.e. using internal store of processing equipment to receive and retain programme
    • G06F9/46—Multiprogramming arrangements
    • G06F9/50—Allocation of resources, e.g. of the central processing unit [CPU]
    • G06F9/5005—Allocation of resources, e.g. of the central processing unit [CPU] to service a request
    • G06F9/5027—Allocation of resources, e.g. of the central processing unit [CPU] to service a request the resource being a machine, e.g. CPUs, Servers, Terminals
    • G06F9/505—Allocation of resources, e.g. of the central processing unit [CPU] to service a request the resource being a machine, e.g. CPUs, Servers, Terminals considering the load
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06Q—DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management, e.g. organising, planning, scheduling or allocating time, human or machine resources; Enterprise planning; Organisational models
    • G06Q10/063—Operations research or analysis
    • G06Q10/0631—Resource planning, allocation or scheduling for a business operation
    • G06Q10/06316—Sequencing of tasks or work

Similar Documents

Publication Publication Date Title
Wu et al. A Petri-net-based scheduling strategy for dual-arm cluster tools with wafer revisiting
Yang et al. Scheduling of single-arm cluster tools for an atomic layer deposition process with residency time constraints
Bai et al. Optimal one-wafer cyclic scheduling and buffer space configuration for single-arm multicluster tools with linear topology
Pan et al. Scheduling cluster tools in semiconductor manufacturing: Recent advances and challenges
Zhu et al. Petri net modeling and scheduling of a close-down process for time-constrained single-arm cluster tools
Qiao et al. Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time constraints and activity time variation
Wu et al. Petri net modeling and cycle-time analysis of dual-arm cluster tools with wafer revisiting
Qiao et al. Schedulability and scheduling analysis of dual-arm cluster tools with wafer revisiting and residency time constraints based on a novel schedule
Qiao et al. Scheduling of dual-arm cluster tools with wafer revisiting and residency time constraints
Feng et al. Robust deadlock prevention for automated manufacturing systems with unreliable resources by using general Petri nets
Mete et al. Resource constrained disassembly line balancing problem
Kim et al. Optimal scheduling of transient cycles for single-armed cluster tools with parallel chambers
US9223307B1 (en) Method for scheduling single-arm cluster tools with wafer revisiting and residency time constraints
Lu et al. An effective scheduling method to single-arm cluster tools for processing multiple wafer types.
Wang et al. Optimal cyclic scheduling of wafer-residency-time-constrained dual-arm cluster tools by configuring processing modules and robot waiting time
US20170083010A1 (en) Optimally Scheduling of Close-down Process for Single-arm Cluster Tools with Wafer Residency Time Constraints
Cho et al. Simulation of intelligent hierarchical flexible manufacturing: batch job routing in operation overlapping
Kim et al. Cyclic scheduling of cluster tools with nonidentical chamber access times between parallel chambers
Lee et al. Analysis of backward sequence for single-armed cluster tools with processing time variations
Lee et al. The impact of processing time variations on swap sequence performance in dual-armed cluster tools
Zaidi et al. Task allocation based on shared resource constraint for multi-robot systems in manufacturing industry
Zhu et al. Scheduling single-arm multi-cluster tools with lower bound cycle time via Petri nets
Yi et al. Heuristic Scheduling for Robotic Job Shops Using Petri Nets and Artificial Potential Fields
Zhu et al. Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time
Huang et al. Job scheduling at cascading machines