Hao et al., 2003 - Google Patents
Miniature thermoacoustic cryocooler driven by a vertical comb-driveHao et al., 2003
- Document ID
- 12006007916023943379
- Author
- Hao Z
- Fowler M
- Hammer J
- Whitley M
- Brown D
- Publication year
- Publication venue
- MOEMS and Miniaturized Systems III
External Links
Snippet
In this paper, we propose a novel miniature MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices. The basic idea is to exploit a new way to realize a highly-reliable miniature cryo-cooler, which would allow integration of a …
- 238000001816 cooling 0 abstract description 36
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