CN109581861B - Motion stage control system, motion stage system, and exposure apparatus - Google Patents
Motion stage control system, motion stage system, and exposure apparatus Download PDFInfo
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Abstract
The invention provides a motion platform control system, a motion platform system and an exposure device, wherein the control system comprises a motion platform, a measurement system and a PID controller, the PID controller comprises an integral module, a proportional gain module and a differential module, the input error is processed by the proportional gain module and then is respectively input to the differential module and the integral module, and the PID controller synthesizes the output quantities of the proportional gain module, the differential module and the integral module to obtain a control quantity; the integration module comprises a reset integrator and a conventional integrator, the reset integrator is used for performing corresponding output after integration processing on input errors processed by the proportional gain module, and the integration module outputs signals based on the proportion of introduced reset and the proportion of not introduced reset and combining the output quantities of the reset integrator and the conventional integrator.
Description
Technical Field
The invention relates to the field of photoetching, in particular to a motion table control system, a motion table system and an exposure device.
Background
Because the PID (Proportional-Integral-Derivative) controller has a simple structure and is easy to debug, the PID controller is widely applied to a feedback control system of a motion table of a photoetching machine. However, for a closed loop control system, some performance limitations are unavoidable. For a PID controller, the integrator functions to eliminate the steady state error of the closed loop control system, but results in a system response with a large overshoot and a long steady state time. The derivative effect in the controller can improve the adverse effect caused by the integral effect, but the derivative effect is too large, so that the system cannot suppress high-frequency noise. To eliminate the large overshoot and long settling time effects caused by integration, a reset control method is applied in the motion stage control system.
The reset control is based on PID controller to optimize the integrator. The principle of the reset control is to zero the current state of the integrator when the controller input value crosses zero. In the motion stage control system, the reset control is to set the integration operation to 0 when the control deviation e (t) becomes 0. The reset control is shown in figure 1 in a closed loop configuration block diagram of the motion stage system.
Patent CN201510058161 adopts the control structure shown in fig. 2, which is a control system combining proportional integral and state reset. The method has the advantages that the integration function of the controller is reserved, and the steady-state error of the system without the integrator is guaranteed to be 0. The method has the disadvantages that a first-order reset link is adopted, the structure of the existing PID controller is changed, and the adjustment parameters and the debugging complexity are increased. Meanwhile, the influence of the resetting mechanism on the system frequency domain is not considered, and for an actual workpiece stage system with a critical stability margin, if the resetting mechanism changes the performance of the system frequency domain, the system cannot be converged, and the brought consequences are serious.
Disclosure of Invention
The technical problem to be solved by the invention is how to ensure the debugging freedom degree of the system and accurately adjust the performance of the motion platform.
In order to solve the above technical problems, a first aspect of the present invention provides a motion stage control system, a motion stage system, and an exposure apparatus, including a motion stage, a measurement system, and a PID controller, where the PID controller controls a motion position of the motion stage by using an error between a position observed value detected by the motion stage and a position set value as an input error, the PID controller includes an integration module, a proportional gain module, and a differentiation module, the input error is processed by the proportional gain module and then input to the differentiation module and the integration module, and the PID controller integrates output quantities of the proportional gain module, the differentiation module, and the integration module to obtain a control quantity;
the integration module comprises a reset integrator and a conventional integrator, the conventional integrator is used for performing corresponding integration processing on input errors processed by the proportional gain module and outputting the input errors, the reset integrator is used for performing corresponding integration processing on the input errors processed by the proportional gain module and outputting the input errors, and the integration module is used for outputting signals based on the proportion of introduced reset and the proportion of not introduced reset and combining the output quantities of the reset integrator and the conventional integrator.
Optionally, an acceleration error value between the motion acceleration observed value of the motion stage and the acceleration set value is input to the reset integrator, so that: the current state of the reset integrator is reset when the sign of the current acceleration error value is opposite to the sign of the acceleration error value of the previous servo cycle.
Optionally, the reset integrator further inputs a reset integral-proportional coefficient unit, and the reset integral-proportional coefficient unit is used for being adjusted to change the reset initial state value.
Optionally, the integration module further includes a reset proportion unit and an un-reset proportion unit;
the reset proportion unit is used for: processing the input error processed by the proportional gain module in the proportion of the introduced reset and outputting the processed input error to the reset integrator;
the non-reset proportion unit is used for: and processing the input error processed by the proportional gain module in a proportion that the adjusted reset is not introduced, and outputting the processed input error to the conventional integrator.
Optionally, the processing result of resetting the integrator is output to an integration compensation unit.
Optionally, the integral compensation unit is configured to compensate the result output by the reset integrator by an integral compensation coefficient as follows:
wherein, P is a reset scaling factor for indicating a proportion of the reset introduced, and R is a reset integral scaling factor for indicating an initial state value of the reset.
Optionally, the reset integrator control equation is: x is the number ofr(t+)＝R·xr(t),e(t)·e(t-)＜0。
Optionally, the action mechanism of the PID controller is expressed by the following equation:
wherein u (t) is the output of the PID controller, e (t) is the current input error; e (t)-) For the input error of the last servo cycle, kpRepresenting proportional gain in PID controllers, fiRepresenting the integration frequency, f, in a PID controllerdThen represents the differential frequency, x, in the PID controllerr(t) represents the currently integrated state quantity, xr(t+) Representing the integrated state output after reset.
Optionally, the mathematical model of the motion table is expressed as:
wherein m is the moving mass of the moving platform, c is the cable damping, and k is the cable stiffness.
Optionally, the mathematical model of the motion table is expressed as:
wherein m is the moving mass of the moving platform.
A second aspect of the invention provides a motion stage system that controls motion of the motion stage using a control system of the motion stage.
A third aspect of the invention provides an exposure apparatus comprising at least an illumination system, an alignment system, a motion stage system, said motion stage system comprising a motion stage and said motion stage control system.
Optionally, the motion stage is a mask stage and/or a workpiece stage.
In order to ensure the debugging freedom degree of the system and the performance of the fine tuning platform, the invention further introduces a conventional integrator on the basis of resetting the integrator, simultaneously respectively processes the resetting integrator and the conventional integrator on the basis of the proportion introduced by resetting and the proportion not introduced, and distributes the two integrators into a loop according to a certain proportion, thereby effectively ensuring that the steady-state error is 0.
Drawings
FIG. 1 is a schematic diagram of a motion stage control system of the prior art;
FIG. 2 is a schematic diagram of a PID controller in a prior art motion stage control system;
FIG. 3 is a schematic view of a system for controlling a movable stage according to embodiment 1 of the present invention;
FIG. 4 is a schematic view of a system for controlling a movable stage according to embodiment 2 of the present invention;
FIG. 5 is a diagram of the relationship between the phase lifting of the system and the parameter P, R in embodiment 2 of the present invention;
FIG. 6 is a schematic diagram of a debugging process in embodiment 2 of the present invention;
fig. 7 is a schematic view of a motion stage control system in embodiment 3 of the present invention;
fig. 8 is a schematic diagram of a debugging process in embodiment 3 of the present invention.
Detailed Description
The motion table control system provided by the present invention will be described in detail with reference to fig. 3 to 8, which are alternative embodiments of the present invention, and it is considered that those skilled in the art can modify and decorate it without departing from the spirit and scope of the present invention.
Please refer to fig. 3, fig. 4, and fig. 7 for a motion stage control system in an embodiment, the present invention provides a motion stage control system, which includes a motion stage, a measurement system, and a PID controller, wherein the PID controller controls a motion position of the motion stage by using an error between a position observation value detected by the motion stage and a position set value as an input error, the PID controller includes an integration module, a proportional gain module, and a differentiation module, the input error is processed by the proportional gain module and then input to the differentiation module and the integration module, and the PID controller integrates output quantities of the proportional gain module, the differentiation module, and the integration module to obtain a control quantity;
the integration module comprises a reset integrator and a conventional integrator, the conventional integrator is used for performing corresponding integration processing on input errors processed by the proportional gain module and outputting the input errors, the reset integrator is used for performing corresponding integration processing on the input errors processed by the proportional gain module and outputting the input errors, and the integration module is used for outputting signals based on the proportion of introduced reset and the proportion of not introduced reset and combining the output quantities of the reset integrator and the conventional integrator.
Regarding the use of reset integrators therein:
in embodiment 1, referring to fig. 3, similar to the related art, the principle of the reset control is to set the current state of the integrator to zero when the input value of the controller crosses zero.
Referring to fig. 4 and fig. 3, the most difference between the embodiment 2 and the embodiment 1 is that an acceleration error value between an observed value and a set value of an acceleration of the motion stage is input to the reset integrator, so that: the current state of the reset integrator is reset when the sign of the current acceleration error value is opposite to the sign of the acceleration error value of the previous servo cycle.
This design is made possible because:
the measurement system of the motion table of the lithography machine is strongly interfered by the environment, for example, when an interferometer system is adopted as the measurement system, the measurement value has errors, the position precision requirement of the motion table system applied to the lithography machine usually reaches the nanometer level, and the actual measurement system is difficult to detect whether the input value of the controller crosses zero, so the reset rule needs to be optimized. The improvement is that: the actual control system is a discrete system, and if the current error value and the over-error value are opposite in sign, the system is reset;
further, as shown in fig. 4, the optimization method of the reset mechanism is to use an acceleration sensor, directly adopt the current acceleration value of the motion table, and match the set value of the acceleration of the motion table after the trajectory planning, so that the real-time acceleration deviation of the motion table can be obtained, and when the current value of the acceleration deviation is opposite to the previous value of the deviation of the servo cycle, the reset action is started. The method is used for directly detecting the actual motion state of the motion platform, and is more accurate. Meanwhile, the triggering mechanism of the originally adopted reset control technology is that the response error of the detection system is restricted by the delay action of the feedback loop, and the loop delay can be eliminated by directly detecting the acceleration of the motion platform.
In embodiments 1 to 3, in order to ensure the degree of freedom in debugging the system and to finely adjust the performance of the stage, the adjustability of the reset initial value of the controller integration is increased, the reset coefficient is introduced, and the system reset rate is changed.
Specifically, the reset integrator is further input with a reset integral proportion coefficient unit, and the reset integral proportion coefficient unit is used for being adjusted to change the reset initial state value.
The integration module further comprises a reset proportion unit and an un-reset proportion unit;
the reset proportion unit is used for: processing the input error processed by the proportional gain module in the proportion of the introduced reset and outputting the processed input error to the reset integrator;
the non-reset proportion unit is used for: and processing the input error processed by the proportional gain module in a proportion that the adjusted reset is not introduced, and outputting the processed input error to the conventional integrator.
With these two optimizations, the reset equation is changed to:
namely: the reset integrator control equation is: x is the number ofr(t+)＝R·xr(t),e(t)·e(t-)＜0。
The action mechanism of the PID controller is expressed by the following equation:
wherein u (t) is the output of the PID controller, e (t) is the current input error; e (t)-) For the input error of the last servo cycle, kpRepresenting proportional gain in PID controllers, fiRepresenting the integration frequency, f, in a PID controllerdThen represents the differential frequency, x, in the PID controllerr(t) represents the currently integrated state quantity, xr(t+) Representing the integrated state output after reset.
In example 2, the mathematical model of the motion stage is expressed as:
wherein m is the moving mass of the moving platform, c is the cable damping, and k is the cable stiffness.
The steady state error for a single axis SISO system for a moving station can then be calculated (let the set value be a step signal):
wherein e(s) represents an error term, r(s) represents a reference input term, GwsFor transfer function of the controlled object, i.e. the moving table, GcIs the transfer function of the controller. From the results, it can be seen that the steady state error is not guaranteed to be 0 without a pure integral term in the controller. It may further prove advantageous to incorporate two integrators in accordance with the present inventionThe effect is that the structure of the reset controller is changed into a PI + CI integrator, wherein the integrator and the reset integrator need to exist at the same time, and an access loop is distributed according to a certain proportion. After the PI + CI integrator is adopted, the integral compensation coefficient needs to be changed, and meanwhile, the sequence of the debugging steps is further determined.
After calculation and derivation, the processing result of the reset integrator is output to an integral compensation unit, and the integral compensation unit is used for compensating the result output by the reset integrator by the following integral compensation coefficients:
after adopting this kind of structure, can make the phase place of system promote under the condition that does not influence system amplitude:
the law of the relationship between the phase lifting of the system and the parameters P and R is shown in FIG. 5.
It can be seen that, the reset control structure applied to the motion stage in embodiment 2, where P is the reset scale factor combining PID and the reset mechanism, can change the scale of the reset mechanism introduced into the PID controller; r is a reset integral proportion coefficient, and the initial state value of the reset can be changed; and ki is an integral gain compensation coefficient, and a value can be obtained by calculating from (3-5), so that the debugging difficulty is reduced, and the influence of a resetting mechanism on the frequency domain performance of the system can be eliminated.
And introducing new debugging parameters P and R, wherein the debugging process has a sequence, and the debugging needs to follow the steps shown in FIG. 6. During initial debugging, starting from the PID parameters and the debugging of the parameters of each compensator, the numerical value of the fi parameter can be properly increased, the stability of the system is ensured, meanwhile, the phase margin of the system can be properly sacrificed to improve the bandwidth and the integral frequency of the system, and the phase margin can be kept at about 20-35 degrees. After the reset is introduced, the phase margin of the system can be improved.
In embodiment 3, the workpiece stage adopts a cable stage structure, or a cable stiffness and damping compensation module is introduced, and the controller structure is changed into the structure shown in fig. 7. The mathematical model of the motion stage is simplified to:
wherein m is the motion quality of the motion platform, and the steady-state error of the single-axis SISO system of the motion platform can be calculated (the set value is a step signal):
wherein e(s) represents an error term, r(s) represents a reference input term, GwsFor transfer function of the controlled object, i.e. the moving table, GcIs the transfer function of the controller. Because the integral term exists in the controlled object, the steady-state position error can be guaranteed to be 0, and the debugging step is changed to the step shown in fig. 8.
An embodiment of the present invention further provides a motion stage system, where the motion stage system controls the motion of the motion stage using a control system of the motion stage.
The invention also provides an exposure device, which at least comprises an illumination system, an alignment system and a motion table system, wherein the motion table system comprises a motion table and a motion table control system.
Optionally, the motion stage is a mask stage and/or a workpiece stage.
In summary, in order to ensure the degree of freedom in debugging the system and the performance of the fine tuning stage, the present invention further introduces a conventional integrator on the basis of the reset integrator, and simultaneously, processes the reset integrator and the conventional integrator respectively based on the proportion of the introduced reset and the proportion of the non-introduced reset, and allocates the two integrators to be connected to the loop according to a certain proportion, so as to effectively ensure that the steady-state error is 0.
Claims (12)
1. A motion stage control system, characterized by: the PID controller takes an error between a position observation value and a position set value detected by the motion table as an input error and controls the motion position of the motion table, the PID controller comprises an integration module, a proportional gain module and a differential module, the input error is processed by the proportional gain module and then is respectively input to the differential module and the integration module, and the PID controller synthesizes output quantities of the proportional gain module, the differential module and the integration module to obtain a control quantity;
wherein, the integration module comprises an un-reset proportion unit, a reset integrator and a conventional integrator, the un-reset proportion unit is used for processing the input error processed by the proportional gain module in a proportion that the adjusted reset is not introduced and outputting the processed input error to the conventional integrator, the conventional integrator is used for performing corresponding integration processing on the input error processed by the proportional gain module and the un-reset proportion unit and outputting the processed input error, the reset proportion unit is used for processing the input error processed by the proportional gain module in a proportion that the adjusted reset is introduced and outputting the processed input error to the reset integrator, the reset integrator is used for performing corresponding integration processing on the input error processed by the proportional gain module and the reset proportion unit and outputting the processed input error, the integration module outputs a signal based on the ratio of reset introduced to non-introduced and combining the output of the reset integrator and the conventional integrator.
2. The motion stage control system of claim 1, wherein: an acceleration error value between a motion acceleration observed value and an acceleration set value of the motion stage is input to the reset integrator, so that: the current state of the reset integrator is reset when the sign of the current acceleration error value is opposite to the sign of the acceleration error value of the previous servo cycle.
3. The motion stage control system of claim 1, wherein: the reset integrator is also input with a reset integral proportion coefficient unit which is used for being adjusted and changing the reset initial state value.
4. The motion stage control system according to any one of claims 1 to 3, wherein: the processing result of the reset integrator is output to an integral compensation unit.
5. The motion stage control system of claim 4, wherein: the integral compensation unit is used for compensating the result output by the reset integrator by the following integral compensation coefficients:
wherein, P is a reset scaling factor for indicating a proportion of the reset introduced, and R is a reset integral scaling factor for indicating an initial state value of the reset.
6. The motion stage control system according to any one of claims 1 to 3, wherein: the reset integrator control equation is: x is the number ofr(t+)＝R·xr(t),e(t)·e(t-)＜0。
7. The motion stage control system of claim 6, wherein: the action mechanism of the PID controller is expressed by the following equation:
wherein u (t) is the output of the PID controller, e (t) is the current inputAn error; e (t)-) For the input error of the last servo cycle, kpRepresenting proportional gain in PID controllers, fiRepresenting the integration frequency, f, in a PID controllerdThen represents the differential frequency, x, in the PID controllerr(t) represents the currently integrated state quantity, xr(t+) Representing the integrated state output after reset.
8. The motion stage control system according to any one of claims 1 to 3, wherein: the mathematical model of the motion table is expressed as:
wherein m is the moving mass of the moving platform, c is the cable damping, and k is the cable stiffness.
9. The motion stage control system of claim 1 or 3, wherein: the mathematical model of the motion table is expressed as:
wherein m is the moving mass of the moving platform.
10. A motion stage system, characterized in that the motion stage system controls the motion of the motion stage using a motion stage control system according to any of claims 1-9.
11. An exposure apparatus comprising at least an illumination system, an alignment system, a motion stage system, characterized in that the motion stage system comprises a motion stage and a motion stage control system according to any of claims 1-9.
12. The exposure apparatus according to claim 11, wherein the moving stage is a mask stage and/or a workpiece stage.
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| CN109581861A (en) | 2019-04-05 |
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