Papers by Enrico Melissano
Precursors for the combustion synthesis of metal oxides from the sol–gel processing of metal complexes
Journal of the European Ceramic Society, 2007
... Oxide materials produced with this method include several ferrites 4 and spinels, 5 tin oxide... more ... Oxide materials produced with this method include several ferrites 4 and spinels, 5 tin oxide 6 and antimony tin oxide ... process requires low activation temperatures and proceeds through highly exothermic processes, showing the possibility of obtaining pure powders without any ...
Deposition of profiled optical coatings by masking techniques: a study in the framework of the linear system theory
Pure and Applied Optics: Journal of the European Optical Society Part A, 1994
Fabrication of a coated graded reflectance mirror (GRM) is based on a multilayer design where one... more Fabrication of a coated graded reflectance mirror (GRM) is based on a multilayer design where one or more layers have a radially variable thickness. We describe and experimentally validate a method that can be used to predict the shape of a profiled layer deposited by masking techniques. Deposition by masking techniques is modelled in the framework of the linear system
Dual Ion Beam Deposition and Characterizatio of TiO<sub>x</sub> Thin Films
Materials Science Forum, 1996
... gas ratio in assisting beam. 1. E.Hacker, J.Lauth, J.Meyer and P.Weissbrodt, Thin Solid Films... more ... gas ratio in assisting beam. 1. E.Hacker, J.Lauth, J.Meyer and P.Weissbrodt, Thin Solid Films, 192 ( 1990) 27 2. Klingler, W. Weppner, Appi. ... Choudhury, SO Saied, JL Sullivan and AM Abbot, J. of Phys. 1): Appi. I'hys. 22 (1989) 1185-1195 Page 6. 166 Advances in Crystal Growth ...
Low temperature sputtering deposition of Al1−xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar + N2) reactive atmosphere
Journal of applied physics, Mar 26, 2024
A complete vector-2D micro-integrated sensors system for magnetic field measurement is proposed. ... more A complete vector-2D micro-integrated sensors system for magnetic field measurement is proposed. The system consists of a micro-integrated Fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is the VITROVAC 6025X deposited over the micro-integrated coils with the RF magnetron sputtering process deposition.
Complete Excitation and Readout CMOS Integrated Circuit for 2D Micro-Fluxgate Magnetic Sensors
Improvement of the Piezoelectric Response of Aln Thin Films Through the Evaluation of the Contact Surface Potential by Piezoresponse Force Microscopy
Sensor with Digital Output
and its resistance is about of 120Ω. While the total area for the aluminium sensing coils, with 1... more and its resistance is about of 120Ω. While the total area for the aluminium sensing coils, with 1µm thickness, 1.4µm metal width, 1.6µm spacing and consisting of 66 turns, is 650×650µm 2 , and their resistance is about of 1.84kΩ. Applying a triangular excitation current of 18mA peak at 100kHz achieves a magnetic sensitivity of about 0.45mV/µT, suitable for detecting the Earth's magnetic field (±60µT). The CMOS integrated interface circuit is able to excite the sensor with the desired current, readout the signal from the sensing coils of the sensor, process it, and provide a digital output signal. Thanks to the high-voltage (up to 26V) output stage of the excita- tion circuit, this interface circuit can be used with different micro-fluxgate magnetic sensors even if they require a large cur- rent for the excitation coils. Moreover, in the read-out chain it is possible to set the gain of the channel according to the sensor out- put amplitude, thus allowing us to adapt the circuit t...
Synthesis and characterization of UV‐curable nanocellulose/ZnO/AlN acrylic flexible films: Thermal, dynamic mechanical and piezoelectric response
Journal of Applied Polymer Science, 2020
This work is aimed at fabricating nanocomposites based on zinc oxide (ZnO) nanostructures and nan... more This work is aimed at fabricating nanocomposites based on zinc oxide (ZnO) nanostructures and nanocellulose dispersed in a UV‐cured acrylic matrix (EC) for application as functional coatings for self‐powered applications. Morphological, thermal, and dynamic mechanical properties of the nanocomposites were characterized by X‐Ray diffractometry (XRD), scanning electron microscopy, and differential scanning calorimetry. The piezoelectric behavior was evaluated in terms of root mean square (RMS) open circuit voltage, at different accelerations applied to cantilever beams. The generated voltage was correlated with ZnO nanostructures morphology, aluminum nitride film integration on the beam and proof mass insertion at the tip. Nitride layer increased the RMS voltage from 1 to 2.4 mV up to 3.9 mV (using ZnO nanoflowers). As confirmed by XRD analyses, the incorporation of ZnO nanostructures into the acrylic matrix favored an ordered structural arrangement of the deposited AlN layer, hence i...
Chemosensors, 2019
Unconventional lithography (such as nanosphere lithography (NSL) and colloidal lithography (CL)) ... more Unconventional lithography (such as nanosphere lithography (NSL) and colloidal lithography (CL)) is an attractive alternative to sequential and very expensive conventional lithography for the low-cost fabrication of large-area nano-optical devices. Among these, nanohole (NH) arrays are widely studied in nanoplasmonics as transducers for sensing applications. In this work, both NSL and CL are implemented to fabricate two-dimensional distributions of gold NHs. In the case of NSL, highly ordered arrays of gold NHs distributed in a hexagonal lattice onto glass substrates were fabricated by a simple and reproducible approach based on the self-assembling of close-packed 500 nm diameter polystyrene particles at an air/water interface. After the transfer onto a solid substrate, the colloidal masks were processed to reduce the colloidal size in a controllable way. In parallel, CL was implemented with short-range ordered gold NH arrays onto glass substrates that were fabricated by electrostat...
Proceedings, 2018
Present work reports the fabrication and characterization of a flexible AlN-based piezoelectric p... more Present work reports the fabrication and characterization of a flexible AlN-based piezoelectric pressure sensor integrated, as insulin capsule punching detector, into an implantable artificial pancreas (AP), developed as automated treatment device for Type 1 diabetes. Ti/AlN/Ti trilayer was sputtered on a thin kapton substrate at room temperature, making the final device flexible and sensitive to the forces range of interest (0–4 N). The proposed preliminary prototype of AP comprises a refilling module, interfaced with the intestine wall, able to dock an ingestible insulin capsule. A linearly actuated needle punches the capsule to transfer the insulin to an implanted reservoir. The pressure sensor is located at the connection of the needle with the linear actuator to sense the occurred capsule punching. The sensor waveform output was processed to clearly identify the capsule punching.
Complete Excitation and Readout CMOS Integrated Circuit for 2D Micro-Fluxgate Magnetic Sensors
Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem
Sensors and Actuators A: Physical, 2006
A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. Th... more A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of ±50μT with a sensitivity of 0.45mV/μT.
A CMOS 2D Micro-Fluxgate Earth Magnetic Field Sensor with Digital Output
2007 IEEE International Solid-State Circuits Conference. Digest of Technical Papers, 2007
Page 1. 390 2007 IEEE International Solid-State Circuits Conference ISSCC 2007 / SESSION 21 / S... more Page 1. 390 2007 IEEE International Solid-State Circuits Conference ISSCC 2007 / SESSION 21 / SENSORS AND MEMS / 21.6 21.6 A CMOS 2D Micro-Fluxgate Earth Magnetic Field Sensor with Digital Output Andrea Baschirotto1 ...
IEEE Transactions on Instrumentation and Measurement, 2009
In this paper, a double-axis planar micro-Fluxgate magnetic sensor and its front-end circuitry ar... more In this paper, a double-axis planar micro-Fluxgate magnetic sensor and its front-end circuitry are presented. The ferromagnetic core material, i.e., the Vitrovac 6025 X, has been deposited on top of the coils with the dc-magnetron sputtering technique, which is a new type of procedure with respect to the existing solutions in the field of Fluxgate sensors. This procedure allows us to obtain a core with the good magnetic properties of an amorphous ferromagnetic material, which is typical of a core with 25-μm thickness, but with a thickness of only 1 μm, which is typical of an electrodeposited core. The micro-Fluxgate has been realized in a 0.5-μm CMOS process using copper metal lines to realize the excitation coil and aluminum metal lines for the sensing coil, whereas the integrated interface circuitry for exciting and reading out the sensor has been realized in a 0.35-μm CMOS technology. Applying a triangular excitation current of 18 mA peak at 100 kHz, the magnetic sensitivity achieved is about 10 LSB/μT [using a 13-bit analog-to-digital converter (ADC)], which is suitable for detecting the Earth's magnetic field (±60 μT), whereas the linearity error is 3% of the full scale. The maximum angle error of the sensor evaluating the Earth magnetic field is 2 • . The power consumption of the sensor is about 13.7 mW. The total power consumption of the system is about 90 mW.
Adhesion enhancement of optical coatings on plastic substrate via ion treatment
Thin Solid Films, 1999
The main limitation in using plastics for optical components is the softness of their surface, wh... more The main limitation in using plastics for optical components is the softness of their surface, which is responsible for low impact and abrasion resistance and for weak adhesion between the film and the substrate. Protecting the substrate with a hard film can increase the impact resistance of polymeric lenses. However, deposition of thin films on chemically cleaned plastic substrates has
A 2-D Planar Microfluxgate with Sputtered Core
Sensors and Microsystems - Proceedings of the 11th Italian Conference, 2008
Adhesion enhancement of optical coatings on plastic substrate via ion treatment
Thin Solid Films, 1999
The main limitation in using plastics for optical components is the softness of their surface, wh... more The main limitation in using plastics for optical components is the softness of their surface, which is responsible for low impact and abrasion resistance and for weak adhesion between the film and the substrate. Protecting the substrate with a hard film can increase the impact resistance of polymeric lenses. However, deposition of thin films on chemically cleaned plastic substrates has
Deposition of profiled optical coatings by masking techniques: a study in the framework of the linear system theory
Pure and Applied Optics: Journal of The European Optical Society Part A, 1994
Fabrication of a coated graded reflectance mirror (GRM) is based on a multilayer design where one... more Fabrication of a coated graded reflectance mirror (GRM) is based on a multilayer design where one or more layers have a radially variable thickness. We describe and experimentally validate a method that can be used to predict the shape of a profiled layer deposited by masking techniques. Deposition by masking techniques is modelled in the framework of the linear system
Dual Ion Beam Deposition and Characterizatio of TiO x Thin Films
Materials Science Forum, 1996
... gas ratio in assisting beam. 1. E.Hacker, J.Lauth, J.Meyer and P.Weissbrodt, Thin Solid Films... more ... gas ratio in assisting beam. 1. E.Hacker, J.Lauth, J.Meyer and P.Weissbrodt, Thin Solid Films, 192 ( 1990) 27 2. Klingler, W. Weppner, Appi. ... Choudhury, SO Saied, JL Sullivan and AM Abbot, J. of Phys. 1): Appi. I'hys. 22 (1989) 1185-1195 Page 6. 166 Advances in Crystal Growth ...
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Papers by Enrico Melissano