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Figure 4 Demonstration of laser profilometry system precision and repeatability ona .5 mm gauge block. Color maps of laser scans ona 4 xX 4 mm region are taken using a step size of (A) 25 um and (B) 100 um. Furthermore, consecutive scans of the same area using 100 um step sizes are shown in (C) as scan-to-scan variation in thickness measurements.
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