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Fig. 4. Higher magnification SEM of the micro-structure, showing edge acuity Fig. 3. SEM of micro-structure patterned by DXRL

Figure 4 Higher magnification SEM of the micro-structure, showing edge acuity Fig. 3. SEM of micro-structure patterned by DXRL

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Fig. 1. The molecular structure of GR650 The repeated units form the “ladder” type siloxane [8]. The GR650 film was cast on the silicon substrate with a base layer of Teflon for the consideration of the thermal expansion coefficient. The film was patterned by DXRL, synchrotron radiation. As negative resist, the areas of the SOG films not exposed to the X-ray irradiation were As mentioned above, we choose GR650 as the SOG mate- rial in the following processing due to its good shape stability when formed into monoliths [15]. Figure 1 shows the molecular structure of GR650.
Fig. 1. The molecular structure of GR650 The repeated units form the “ladder” type siloxane [8]. The GR650 film was cast on the silicon substrate with a base layer of Teflon for the consideration of the thermal expansion coefficient. The film was patterned by DXRL, synchrotron radiation. As negative resist, the areas of the SOG films not exposed to the X-ray irradiation were As mentioned above, we choose GR650 as the SOG mate- rial in the following processing due to its good shape stability when formed into monoliths [15]. Figure 1 shows the molecular structure of GR650.
The following pictures (Figs. 3-5) show the structures taken by SEM. The specimens were obtained from two- time exposures. The irradiation dose at the top and the bottom was 15 kJ/cm” and 17 kJ/cm’, respectively. Under these conditions, the best structures have been obtained. The gage width of the specimens on the substrate is 50 jim. The length and the height are about 3.7 mm and 200 tm, respectively.
The following pictures (Figs. 3-5) show the structures taken by SEM. The specimens were obtained from two- time exposures. The irradiation dose at the top and the bottom was 15 kJ/cm” and 17 kJ/cm’, respectively. Under these conditions, the best structures have been obtained. The gage width of the specimens on the substrate is 50 jim. The length and the height are about 3.7 mm and 200 tm, respectively.
Fig. 5. SEM of two-structure array
Fig. 5. SEM of two-structure array
Table 2. Surface roughness measurement of SOG
Table 2. Surface roughness measurement of SOG
Table 3. Data of XPS analysis
Table 3. Data of XPS analysis
Fig. 6. RST surface testing figure
Fig. 6. RST surface testing figure
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