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Figure 2: Different versions of the multi-material gap standard: rejected first design version with general dimensions (a), accepted second design version with general dimensions and highlighted reference features shown by a red star (*) (b)  4.2 Calibration  Reference measurements of the multi-material gap standards were performed using a high-precision tactile micro-CMS Zeiss F25 with the maximum permissible error (MPE) equal to (0.25 + L/666) um (where L = measuring length in mm). A complete calibration could not be performed in the assembled state as it would be impossible to measure the smallest gaps (the size goes down to 10 um) with the used touch probe with a diameter of 120 um. It was therefore necessary to follow an alternative calibration procedure composed of measurements in the mounted and dismounted state and subsequent correction of reference values described by the following four steps:

Figure 2 Different versions of the multi-material gap standard: rejected first design version with general dimensions (a), accepted second design version with general dimensions and highlighted reference features shown by a red star (*) (b) 4.2 Calibration Reference measurements of the multi-material gap standards were performed using a high-precision tactile micro-CMS Zeiss F25 with the maximum permissible error (MPE) equal to (0.25 + L/666) um (where L = measuring length in mm). A complete calibration could not be performed in the assembled state as it would be impossible to measure the smallest gaps (the size goes down to 10 um) with the used touch probe with a diameter of 120 um. It was therefore necessary to follow an alternative calibration procedure composed of measurements in the mounted and dismounted state and subsequent correction of reference values described by the following four steps: