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upon the precise determination of displacement fields, such as hole drilling'®? or slitting”. FIG. 12. SEM image of the parallel FIB-DIC technique in which the interfaces between the SiC region, the graphite core outer and the graphite core inner are highlighted. The core sizes are uniform in the direction of the global surface normal. However, slight variations in topology create the illusion of size variation. The Z-contrast induced by colloidal silica is also shown !. reliably implemented at lower magnification, e.g. compared to FIB-DIC techniques which rely

Figure 12 upon the precise determination of displacement fields, such as hole drilling'®? or slitting”. FIG. 12. SEM image of the parallel FIB-DIC technique in which the interfaces between the SiC region, the graphite core outer and the graphite core inner are highlighted. The core sizes are uniform in the direction of the global surface normal. However, slight variations in topology create the illusion of size variation. The Z-contrast induced by colloidal silica is also shown !. reliably implemented at lower magnification, e.g. compared to FIB-DIC techniques which rely

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FIG. 4. Spatially resolved residual stress analysis in an etched surface of porous silicon®’. The Raman peak shift detected at each location is shown in (a), and the corresponding residual stresses are shown in (b). combining the two microscopy modes within one instrument, important recent development in this field is correlative Raman and SEM imaging achieved
FIG. 5. A schematic of the sequential (left) and parallel (right) FIB-DIC milling approaches. whereas parallel milling requires simultaneous milling of multiple features in a contiguous array FUNDAMENTALS: THE SEQUENTIAL SPATIALLY RESOLVED RING-CORE
FIG. 5. A schematic of the sequential (left) and parallel (right) FIB-DIC milling approaches. whereas parallel milling requires simultaneous milling of multiple features in a contiguous array FUNDAMENTALS: THE SEQUENTIAL SPATIALLY RESOLVED RING-CORE
FIG. 6. Steps required to quantify full depth strain relief in the ring-core approach. a) Incremental collection of SEM images during milling. b) DIC marker tracking on the central core region (markers shown in red). c) Gradients of the displacement against position plots provide strain estimates at each milling depth. d) Strain relief analysis is performed in three directions (0°, 45° and 90°). The error bars represent 95% confidence intervals and the fitting function is given in Equation 5.
FIG. 6. Steps required to quantify full depth strain relief in the ring-core approach. a) Incremental collection of SEM images during milling. b) DIC marker tracking on the central core region (markers shown in red). c) Gradients of the displacement against position plots provide strain estimates at each milling depth. d) Strain relief analysis is performed in three directions (0°, 45° and 90°). The error bars represent 95% confidence intervals and the fitting function is given in Equation 5.
FIG. 7. Diagrammatic representation of the magnitude (arrow colour) and orientation (arrow rotation) of the principal stresses over an SEM image of the final milling positions. placed 25 um apart which corresponds to a maximum potential residual stress deviation of 2.5%. shifts observed. Following manual and automated outlier removal, the well-tracked markers were
FIG. 7. Diagrammatic representation of the magnitude (arrow colour) and orientation (arrow rotation) of the principal stresses over an SEM image of the final milling positions. placed 25 um apart which corresponds to a maximum potential residual stress deviation of 2.5%. shifts observed. Following manual and automated outlier removal, the well-tracked markers were
FIG. 8. FIB-DIC and X-ray diffraction residual stress estimates in directions parallel and perpendicular to the sample edge, against distance from the sample edge. The error bars indicate the 95% confidence intervals of each measurement. Least squares fitting of equation 12 has been used to highlight the average trends in the four profiles. comparing conditions of plane strain (XRPD) and plane stress (surface FIB-DIC analysis).
FIG. 8. FIB-DIC and X-ray diffraction residual stress estimates in directions parallel and perpendicular to the sample edge, against distance from the sample edge. The error bars indicate the 95% confidence intervals of each measurement. Least squares fitting of equation 12 has been used to highlight the average trends in the four profiles. comparing conditions of plane strain (XRPD) and plane stress (surface FIB-DIC analysis).
FIG. 10. SEM image of the parallel FIB-DIC milling arrangement — the “chocolate block” geometry. Electron deposition of markers has been used to increase the surface contrast of the cores. The average residual stress in the 4 4m cores was determined at an increment of 5 pm. necessary for accurate stress determination.
FIG. 10. SEM image of the parallel FIB-DIC milling arrangement — the “chocolate block” geometry. Electron deposition of markers has been used to increase the surface contrast of the cores. The average residual stress in the 4 4m cores was determined at an increment of 5 pm. necessary for accurate stress determination.
process. The final sample was a 1x0.5xX0.5 mm? cuboid as shown in the insert in Fig. 11 by the X-ray beam, further sectioning was performed using a similar diamond saw and polishing
process. The final sample was a 1x0.5xX0.5 mm? cuboid as shown in the insert in Fig. 11 by the X-ray beam, further sectioning was performed using a similar diamond saw and polishing
FIG. 14. —_ Radial (a) and hoop (b) absolute strain distributions within the graphite and SiC regions of the core’. The results of both the XRPD and the parallel FIB-DIC are shown as well as the comparable average XRPD results. The 95% confidence intervals of the XRPD values are indicated by the error bars. outer carbon core, on the other hand, is in a state of dilatational strain; the radial component is E. Discussion
FIG. 14. —_ Radial (a) and hoop (b) absolute strain distributions within the graphite and SiC regions of the core’. The results of both the XRPD and the parallel FIB-DIC are shown as well as the comparable average XRPD results. The 95% confidence intervals of the XRPD values are indicated by the error bars. outer carbon core, on the other hand, is in a state of dilatational strain; the radial component is E. Discussion
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Materials EngineeringCondensed Matter PhysicsMaterials ScienceSurfaces and InterfacesMaterials ChemistryDigital Image CorrelationFocused Ion BeamSurface and Coatings TechnologyError EstimationRing Core
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