Au-Mg improved ohmic contacts to p-GaAs
1983, Electronics Letters
https://doi.org/10.1049/EL:19830287…
3 pages
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Abstract
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This paper investigates the improvement of ohmic contacts to p-GaAs by employing Au-Mg alloys. The study provides insights into the characteristics of various contact structures and the mechanisms behind reduced contact resistance, highlighting the challenges posed by achieving effective contacts in III-V semiconductors. By optimizing the alloy composition and processing conditions, significant advancements in contact performance were demonstrated, demonstrating potential for enhanced device efficiency.
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References (5)
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