Design and fabrication of a novel six supports capacitive micro RF switches with Parylene-C as structural material
International Conference on Solid-State and Integrated Circuit Technology, 2006
This paper introduce design and micro fabrication of a novel six supports shunt capacitive MEMS R... more This paper introduce design and micro fabrication of a novel six supports shunt capacitive MEMS RF switch with Au/Parylene-C as structural material. This micro switch consists of a dual-layer actuator with 9.526 volts actuation voltage. This switch adopts novel six supports and double actuation electrodes. This special design can obtain good actuating properties, such as lower actuation voltage and more
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Papers by Jianjun Zhao