Papers by Anatoly Kuzmichev

Nowadays, much attention is paid on coatings with refractive index n distributed with nanometer v... more Nowadays, much attention is paid on coatings with refractive index n distributed with nanometer variation within coatings. They are called as nanogradient coatings. The challenge is to develop a fabrication method, which could provide the desired thickness profile of n. Analysis of different approaches shows that the most appropriate is middle frequency pulse (MFP) magnetron discharge co-sputtering of several materials in a reactive gas atmosphere of constant composition at constant sputtering power of each component. The MFP technology is chosen because it provides the stable precisely controlled operation of magnetrons. The automated two-magnetrons installation for sputtering two materials (e.g. Si and Ti) has been developed. During deposition the location of several substrates varies in a plane above the magnetrons in accordance with the coating program. Each substrate rotates around its own axis and revolves around a common axis for all substrates, and the coordinate of the comm...
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2018
The post-discharge processes in the electrical supply circuit of a technological system with a pu... more The post-discharge processes in the electrical supply circuit of a technological system with a pulsed glow discharge used for the ion-plasma treatment of materials are analyzed, in which a direct current glow discharge is maintained in the pauses between the treatment pulses. The variants of connecting a pulse generator through a separating capacitor or a separating diode are considered and the formulas for determining the time parameters of the recovery process of the direct-current discharge after the end of the treatment pulses are obtained. Recommendations for organizing the electric mode for fast recovery of the direct-current discharge are given, as well as for preventing arc discharge at the negative electrode and extinguishing the arc if it appears.
Математичне програмування в Excel. Навчальний посібник
Розглянуто новий напрямок світлотехніки – НВЧ плазмові світильники на прах сірки, які забезпечуют... more Розглянуто новий напрямок світлотехніки – НВЧ плазмові світильники на прах сірки, які забезпечують безперервний спектр світіння (близький до сонячного) і є екологічно безпечними. Визначено напрями розробок у напрямку конструювання НВЧ ламп і системи НВЧ живлення.New trend of lighting technology – 2.45 GHz microwave plasma sulfur vapor lamps, which provide a continuous emission spectrum (similar to sunlight) and are environmentally friendly, was considered. Field of development in trend of microwave power system and microwave tubes construction is determined.Рассмотрено новое направление светотехники – СВЧ плазменные светильники на прах серы, которые обеспечивают непрерывный спектр свечения (подобный солнечному) и являются экологически безопасными. Определены направления разработок в направлении конструирования СВЧ ламп и системы СВЧ питания
Nanoscale electron-photonic devices based on localized plasmons
Electronics and Communications, 2011
Principal realizations and applications of nanophotonic devices based on localized plasmons are c... more Principal realizations and applications of nanophotonic devices based on localized plasmons are considered

Peculiarities of gas-discharge current interrupter operation in a high-power modulator
Radioelectronics and Communications Systems, 1989
The commutation characteristics of a gas-discharge current interrupter with magnetic control and ... more The commutation characteristics of a gas-discharge current interrupter with magnetic control and its utilization in a pulsed modulator with partial discharge of the capacitive storage device have been considered. The interrupter ensures stable operation of the modulator in a regime in which groups of pulses are generated having a group length of up to 30 sec, a pulse repetition frequency in the group of up to 400 Hz, an average power of up to 180 kW, and an anode voltage of up to 25 kV. An analysis has been performed of the power loss expended for control. It has been demonstrated that it is expedient to use a getter pump in the interrupters, and recommendations have been given for improving the construction of the interrupters and optimizing the regime in which they are switched on.
Ключевые слова-отсечка электронов в магнитном поле; скрещенные поля; импульсный индуктор; вакуумн... more Ключевые слова-отсечка электронов в магнитном поле; скрещенные поля; импульсный индуктор; вакуумный выключатель; рентгеновское излучение; физико-топологическая модель.
Journal of Physics: Conference Series, 2016
Particle number and energy reflection coefficients for energetic neutralized gas ions (Ar and O a... more Particle number and energy reflection coefficients for energetic neutralized gas ions (Ar and O atoms) backscattered from metal targets during ion bombardment have been calculated using TRIM code. The energy distributions of reflected atoms are computed, too, and their dependence on the primary ion energy and the angle of ion incidence is determined. The obtained data confirm the possibility of employing energetic atoms reflection for generation of high energy neutral beams and point out to take this phenomenon into account under analysis of the ion technology for coating deposition.
Multi-component deposition
Vacuum, 2005
A system for impact excitation of the MF magnetron discharge is presented. A thyratron pulser exc... more A system for impact excitation of the MF magnetron discharge is presented. A thyratron pulser excited a ringing circuit, which, in turn, supplied power to the pulsed MF discharge. The discharge current oscillation frequency was 1.76 MHz, the impact excitation frequency was up to 8 kHz. The discharge operated at voltages of several kilovolts and current amplitudes up to a hundred amperes without sparking and arcing on the Ti electrodes in inert and reactive gas and generated large-volume plasma. The proposed power supply combines the advantages of the MF bipolar discharge mode and the conventional pulse modulation.
Electronics and Communications
Atmospheric Pressure Planar Radio Frequency Discharge With Isolated Electrodes: Glow Features and Application Prospects
IEEE Transactions on Plasma Science

On the target surface temperature during dc magnetron sputtering
The European Physical Journal Applied Physics
New simple method for target surface temperature (TST) measurements is successfully developed and... more New simple method for target surface temperature (TST) measurements is successfully developed and described in detail. Along with temperature measurements we measured also the emissivity of each of targets by the method specially developed for this aim. The measurements demonstrate that the surface temperature of the targets prepared from Cu, Mo, Nb discs may substantially (up to ∼300 °C) exceed the temperature of the volume of the target. The definition of a “target surface temperature” is given. It is supposed that the thickness of the surface layer that appears on a target subjected to the ion bombardment is equal or close to the penetration depth of ions bombarding the target. The physical model explaining the formation of the surface layer is suggested. The main idea of the model is that the Ar ions bombarding the target may effectively transfer their kinetic energy mostly to the ionic subsystem rather than to the electron subsystem of a target. Due to very low mobility of meta...

Microsystems, Electronics and Acoustics
Кафедра електронних приладів та пристроїв, Факультет електроніки Національний технічний університ... more Кафедра електронних приладів та пристроїв, Факультет електроніки Національний технічний університет України "Київський політехнічний інститут імені Ігоря Сікорського" kpi.ua Київ, Україна Реферат-У даній роботі проведено аналіз та порівняння можливих конструктивних особливостей надвисокочастотних генераторів низькотемпературної плазми, які будуються на базі еванесцентних хвиль. Метою дослідження є систематизація різних методів та підходів до генерації НВЧ плазми за допомогою еванесцентних хвиль, пошук технології застосування еванесцентних хвиль НВЧ діапазону у плазмовій техніці, проблема забезпечення зони однорідності оброблюваної поверхні твердого тіла великої площі (метри квадратні). У статті розглянуто три підходи, що забезпечують збудження еванесцентної хвилі: збудження за допомогою позамежного хвилеводу; еванесцентна хвиля, що збуджується за допомогою поверхневої хвилі; еванесцентна хвиля, що збуджується поблизу поверхні діелектрика за рахунок ефекту порушення повного внутрішнього відбиття. Представлено результати перших експериментів використання таких генераторів та визначені перспективи їх подальшого застосування для іонно-плазмової технології обробки великих підкладок. Бібл. 13, рис. 6. Ключові словагенерація надвисокочастотної плазми; низькотемпературна плазма; еванесцентні хвилі; надвисокочастотний генератор. discharge plasma. Equipment and technology based on these methods are not fully studied yet and required analysis and improvements. The results of this study could be applied in new designs and processes in the field of treatment of the surface layer of solids. The results of the first experiments using such generators are presented in this paper and prospects of further applications for ion-plasma treatment of the surface layer of solids (deleting, printing material and surface modification) are determined. The issue of microwave plasma generation and other technological processes based on evanescent waves is extremely important. The cause of that is their concern of various branches of science and technology including plasmonics, nanoelectronics, optics and they are widely discussed in recent years. By analogy with the effects in optics, evanescent waves can cause similar effects in gas-discharge technology. "Evanescent waves"-separate direction in electrodynamics associated with the study of these waves: their properties and possibilities of their application. Now this trend is taking on widespread development, especially in nanophotonics (excitation of plasmon oscillations and waves of plasmon polariton type). In this paper, the possibility of using the evanecent mode of the microwave waves for excitation of plasma formation is considered.Also in the paper was devoted the attention to prototyping of microwave generators that will provide the technological requirements for the surface treatment of solids and deposited coatings, giving competitive results, thus are environmentally safe, easy-to-work and relatively inexpensive design on the market. On the basis of the research, propositions of the future developing in this direction are put forward. Ref. 13, fig. 6.
Ion plating method and apparatus
Repairing turbine element
Deposition Apparatus and Methods
Monitoring of substrate temperature
Ceramic Coating Deposition
Vapor Deposition of Ceramic Coatings
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Papers by Anatoly Kuzmichev