Hydrogen diffusion and induced-crystallization in intrinsic and doped hydrogenated amorphous silicon films
Thin Solid Films, Sep 1, 2005
We have studied the evolution of the structure of intrinsic and doped hydrogenated amorphous sili... more We have studied the evolution of the structure of intrinsic and doped hydrogenated amorphous silicon films exposed to a hydrogen plasma. For this purpose, we combine in situ spectroscopic ellipsometry and secondary ion mass spectrometry measurements. We show that hydrogen diffuses faster in boron-doped hydrogenated amorphous silicon than in intrinsic samples, leading to a thicker subsurface layer from the early
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Papers by Fatiha Kail